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Hexamethyldisilazane

Chemical Name:	Hexamethyldisilazane
Product Category:	Crosslinkers & Silazanes \| Silane Coupling Agent
Structural Formula:
CAS NO.:	999-97-3
Molecular formula:	C₆H₁₉NSi₂
EINECS:	213-668-5
Molecular Weight:	161.39 g/mol
Appearance:	Colorless to slightly yellow transparent liquid

Hexamethyldisilazane Description

Hexamethyldisilazane (HMDS) is an organosilicon compound widely used in various industrial and research applications. Its unique chemical structure and properties make it valuable in fields such as microelectronics, pharmaceuticals, and materials science.

Chemical name	Hexamethyldisilazane
Synonyms	Bis(trimethylsilyl)amine, 1,1,1,3,3,3-Hexamethyldisilazane
Boiling point	~126°C (259°F)
Density(25°C),g/cm³	0.774 g/mL
Flash Point	8°C (46°F)
Refractive Index (n_D²⁰)	1.41 at 20°C
Solubility	Insoluble in water; Soluble in organic solvents such as ether, benzene, and toluene
Uses	Microelectronics: HMDS is extensively used as a silylation agent to enhance the adhesion of photoresists to silicon wafers, improving the performance and reliability of semiconductor devices. Pharmaceuticals: In organic synthesis, HMDS serves as a reagent for introducing trimethylsilyl groups, protecting functional groups, and facilitating various chemical reactions. Gas Chromatography: HMDS is utilized as a derivatizing agent to modify polar compounds, reducing their polarity and enhancing volatility for improved chromatographic analysis.
Safety and Handling	HMDS is classified as a hazardous substance with the following considerations: Hazard Statements: Highly flammable liquid and vapor Harmful if swallowed Toxic in contact with skin Toxic if inhaled Causes skin irritation Causes serious eye irritation Harmful to aquatic life with long-lasting effects Precautionary Measures: Use personal protective equipment (PPE) such as gloves, protective clothing, and eye protection. Handle in a well-ventilated area away from ignition sources. Store in a cool, dry place, tightly sealed, and away from incompatible materials.
Packaging	Our standard packing is net 25kg / 200 kg drums / 1000kg/IBC，or according to your requirements.
Sample	Provided for free
Inventory items	6 tons.
Price	Please contact us to get the new price.

Packaging Specifications

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Hexamethyldisilazane: Guide

Hexamethyldisilazane (CAS 999-97-3) is a high-performance organosilicon compound with critical applications in semiconductors, pharmaceuticals, surface treatment, and polymer chemistry. Its ability to improve adhesion, enhance surface properties, and modify chemical structures makes it indispensable in various high-tech and industrial sectors.

🔹 Key Benefits:
✔ Enhances photoresist adhesion in microelectronics
✔ Improves hydrophobicity and surface stability
✔ Serves as an essential reagent in organic synthesis
✔ Increases analytical efficiency in gas chromatography
✔ Widely used in advanced material science and coatings

⚠ Safety Precautions: Due to its flammability and toxicity, HMDS must be handled with proper PPE and ventilation.